Lithography System

Electromagnetic, electrostatic and dynamic focus control are the most common deflection applications for Cirrus Logic power operational amplifiers featuring the technology of Apex Precision Power®. These devices deliver exceptional combinations of high speed, high current and high voltage operation. A design rule of thumb for deflection circuits is to select an amplifier with a minimum slew rate equal to 10 times faster than the desired slew rate to ensure crisp settling performance. For electromagnetic deflection, a combination of high speed and high current is the optimal combination, along with an extended supply range, so the amplifier can slew the current in the yoke rapidly. High-voltage operational amplifiers are best suited to electrostatic deflection and/or focus. Cirrus Logic brand products offer slew rate performance from a low of 100 V/µs to an industry first 3,000 V/µs for a single-package solution. Operating voltages range from 50 V to 450 V single supply, and output current capabilities range from .04 A to 15 A.


  • More than 20 models of high-speed operational amplifiers
  • High output current capabilities
  • Wide supply voltage operation
  • Circuit protection built in
  • IC, hybrid and open frame module product designs

Power Operational Amplifier

Supported Products
  • MP103FC
    15 A, 200 V/µs High Voltage Power Amplifier
  • MP108
    Low Cost Open Frame Packaged, High Voltage 200V, High Power Bandwidth 300kHz Power Amplifier
  • MP108A
    Low Cost Open Frame Packaged, High Voltage 200V, High Power Bandwidth 300kHz Power Amplifier
  • MP111
    Low Cost Open Frame Packaged, High Current 15A, High Voltage 200V, High Power Bandwidth 500kHz Power Amplifier
  • MP400
    10V-50V, High Speed Power Amplifier with Integrated Switch Mode Power Supply
  • PA05
    30A, 100V, 100V/µs Power Amplifier
  • PA05A
    30A, 100V, 100V/µs Power Amplifier
  • PA09
    150MHz, 200V/µs, 2A Power Amplifier
  • PA09A
    150MHz, 200V/µs, 2A Power Amplifier
  • PA09M /883
    150MHz, 200V/µs, 2A Power Amplifier
  • PA78
    Very low standby current, 350V/µs Power Amplifier
  • PA79
    350V, 350V/µs Slew Rate, Low Quiescent Current Power Amplifier
  • PA84
    High slew rate 200V/µs, High Voltage 350V Power Amplifier
  • PA84A
    High slew rate 200V/µs, High Voltage 350V Power Amplifier
  • PA84S
    High slew rate 200V/µs, High Voltage 350V Power Amplifier
  • PA85
    Very High Speed 1000V/µs, High Voltage 450V Power Amplifier
  • PA85A
    Very High Speed 1000V/µs, High Voltage 450V Power Amplifier
  • PA85M
    Very High Speed 1000V/µs, High Voltage 450V Power Amplifier
  • PA90
    400V, 200mA, High Slew Rate 300V/µs Power Amplifier
  • PA91
    450V, 200mA, High Slew Rate 300V/µs Power Amplifier
  • PA94
    Very High Voltage 900V, Very High Slew Rate 500V/µs Power Amplifier
  • PA96
    300V, 1.5A, 250 V/µs Wide Bandwidth Amplifier
  • PA98
    Very High Slew Rate 1000V/µs, High Voltage 450V Power Amplifier
  • PA98A
    Very High Slew Rate 1000V/µs, High Voltage 450V Power Amplifier
  • PA107DP
    3000 V/µs High Voltage Power Amplifier
  • PA119CE
    Very fast 900V/µs, 4A Power Amplifier
  • PA119CEA
    Very fast 900V/µs, 4A Power Amplifier
  • PB50
    200V, 2A, Voltage and Current Gain Power Booster Amplifier with 50V/µs Slew Rate, 160kHz Power Bandwidth
  • PB51
    Power SIP Packaged, 300V, 2A, Voltage and Current Gain Power Booster Amplifier with 50V/µs Slew Rate, 320kHz Power Bandwidth
  • PB51A
    Power SIP Packaged, 300V, 2A, Voltage and Current Gain Power Booster Amplifier with 50V/µs Slew Rate, 320kHz Power Bandwidth
  • PB58
    300V, 2A, Voltage and Current Gain Power Booster Amplifier with 50V/µs Slew Rate, 320kHz Power Bandwidth
  • PB58A
    300V, 2A, Voltage and Current Gain Power Booster Amplifier with 50V/µs Slew Rate, 320kHz Power Bandwidth
  • PB63
    1,000 V/µs, 1 MHz Power Bandwidth, 2-Channel Power Booster Amplifier
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